316L SS Wetted Parts Balanced Main Valve Cv 2.0 Diaphragm or Piston Sensed Range of O Rings None rising stem Low torque adjustment Threaded or Flanged Options

FEATURES 316L SS Machined Wetted Parts Large sensitive elastomeric diaphragm 0,1 bar to 10 bar / 1,5 psi to 150 psi control range Minimal decaying inlet pressure effect For flow rates to 240Nm³/hr (@ max P2)

The BP-301 incorporates a highly sensitive piston to control pressures up to 70 bar with the lower Cv value of 0.1, and 35 bar with a higher Cv of 0.5. Both designs provide accurate back pressure control on liquid or gas applications. Unlike relief valves, the set load from the spring is not directly applied to the seating area, and the piston sensor provides accurate control throughout the control range. FEATURES Lightweight compact design

The HYD 690 is the compact version of the highly successful LF-690 series regulator, it has been designed as an economical alternative to the LF-690, yet still incorporates all the key features of the larger regulator. The Tungsten carbide main valve and 17-4PH SS seat provide ultimate protection against the harsh service encountered on hydraulic services and can now be easily serviced from the spring section. The regulator is self relieving with

SFC-1480F Series is a basic series of compact digital Mass Flow Controllers offering very low flow. FEATURES Very fast response < 0,7 - 1,2 sec flow settling time Metal/rubber seals Flow 1 SCCM - 20 SLM (12 models available) Leak integrity < 1 x 10-11 Pa m3/s He (Viton 10-8) BENEFITS Monitoring of operation using digital interface is possible Minimal particle generation Long operation life

With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion. FEATURES Pressure-insensitive operation High accuracy and repeatability Integrated gas panel components Live gas certified, multi-gas, multi-range configuration Field programmable DeviceNet,

G1 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few models

G3 models satisty the demand for the next generation of samiconductor production. FEATURES Multi-gas,multi-range selection Pressure-insensitive operation Pl LCD display (temp, pressure, set output) easifies control routines Self celibration function BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few mod

G2 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Valve shut-off function Self calibration function BENEFITS Shortening gas purge time needed Complete gas shut-off Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve) Reduction of gas surge Allows one mass flow controller to handle two or more gas types and ranges The

Hitachi Metals Area® FC-R7800 series delivers precise flow control, as well as the corrosion resistance and high leak integrity of metal seals, to suit the majority of gas-controlled applications. FEATURES Corrosion-resistant design Metal seals VCR®, Swagelok® compatible connections Full-scale flow ranges from 10 sccm to 200 slm Normally-closed or normally -open solenoid control valve Leak integrity of 1 × 10-10 atm-cc/